The critical process, as well as the parts for semiconductor device, which should be used in high temperature, vacuum and corrosive gas environment, require clean and dustless environment. However, precision ceramic material could maintain high stability in complicated physical and chemical environment. Semiconductor ceramic part we produced with wear resistance, corrosion resistance, low thermal expansion, insulation is made from 99.5% alumina ceramic and shaped by cold isostatic pressing, high temperature sintering and precision machining and polishing, can meet the stringent requirements of parts for semiconductor equipment.